JPS6265839U - - Google Patents
Info
- Publication number
- JPS6265839U JPS6265839U JP15835485U JP15835485U JPS6265839U JP S6265839 U JPS6265839 U JP S6265839U JP 15835485 U JP15835485 U JP 15835485U JP 15835485 U JP15835485 U JP 15835485U JP S6265839 U JPS6265839 U JP S6265839U
- Authority
- JP
- Japan
- Prior art keywords
- face plate
- attaches
- force
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15835485U JPS6265839U (en]) | 1985-10-15 | 1985-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15835485U JPS6265839U (en]) | 1985-10-15 | 1985-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6265839U true JPS6265839U (en]) | 1987-04-23 |
Family
ID=31081762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15835485U Pending JPS6265839U (en]) | 1985-10-15 | 1985-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6265839U (en]) |
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1985
- 1985-10-15 JP JP15835485U patent/JPS6265839U/ja active Pending